Title :
Semiconductors: Toeing the (microfine) line: Functional density is what counts in advanced solid-state devices. Here´s a report on recent progress
Abstract :
Reports on recent progress in the increase of LSI IC functional densities. Discusses photolithographic and electron beam methods.
Keywords :
electron beam applications; integrated circuit technology; large scale integration; photolithography; electron beam methods; photolithographic methods; semiconductor functional densities;
Journal_Title :
Spectrum, IEEE
DOI :
10.1109/MSPEC.1977.6501718
