DocumentCode
3561494
Title
Semiconductors: Toeing the (microfine) line: Functional density is what counts in advanced solid-state devices. Here´s a report on recent progress
Author
Allan, R.
Volume
14
Issue
12
fYear
1977
Firstpage
34
Lastpage
42
Abstract
Reports on recent progress in the increase of LSI IC functional densities. Discusses photolithographic and electron beam methods.
Keywords
electron beam applications; integrated circuit technology; large scale integration; photolithography; electron beam methods; photolithographic methods; semiconductor functional densities;
fLanguage
English
Journal_Title
Spectrum, IEEE
Publisher
ieee
ISSN
0018-9235
Type
jour
DOI
10.1109/MSPEC.1977.6501718
Filename
6501718
Link To Document