Title :
A MEMS shunt switch on a dielectric membrane
Author :
Nithianandam, J.
Author_Institution :
Dept. of Electr. & Comput. Eng., Morgan State Univ., Baltimore, MD, USA
Abstract :
This paper proposes a MEMS capacitance shunt switch based on a microwave transition from a coplanar waveguide on a dielectric membrane to a coplanar waveguide on silicon. Finite element electromagnetic simulations with HFSS show a maximum insertion loss of 1.25 dB and a maximum isolation of 60 dB for the MEMS switch.
Keywords :
computational electromagnetics; coplanar waveguides; dielectric waveguides; electronic engineering computing; finite element analysis; membranes; microswitches; microwave switches; waveguide transitions; 1.25 dB; HFSS finite element electromagnetic simulations; MEMS capacitance shunt switches; Si; dielectric membrane MEMS shunt switch; dielectric membrane coplanar waveguides; high frequency structural simulators; maximum insertion loss; maximum isolation; microwave coplanar waveguide transitions; silicon coplanar waveguides; Biomembranes; Capacitance; Coplanar waveguides; Dielectrics; Electromagnetic waveguides; Finite element methods; Micromechanical devices; Silicon; Switches; Waveguide transitions;
Conference_Titel :
Microwave Symposium Digest, 2003 IEEE MTT-S International
Print_ISBN :
0-7803-7695-1
DOI :
10.1109/MWSYM.2003.1210985
