Title :
A MEMS controlled cavity optomechanical sensing system
Author :
Miao, Houxun ; Srinivasan, Kartik ; Aksyuk, Vladimir
Author_Institution :
Center for Nanoscale Sci. & Technol., Nat. Inst. of Stand. & Technol., Gaithersburg, MD, USA
Abstract :
We report a fully-integrated MEMS sensing platform enabled by cavity optomechanics. We demonstrate 4.6 fm/Hz1/2 displacement sensitivity for sub-μW input power, electrostatically-tunable readout gain, and feedback damping of mechanical response by a factor of >;1000.
Keywords :
damping; displacement measurement; integrated optics; micro-optomechanical devices; microcavities; microsensors; optical control; optical feedback; optical sensors; optical tuning; MEMS controlled cavity optomechanical sensing system; displacement sensitivity; electrostatically-tunable readout gain; feedback damping; fully-integrated MEMS sensing platform; mechanical response; Cavity resonators; Noise; Optical feedback; Optical resonators; Optical sensors; Optical variables measurement;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2012 Conference on
Print_ISBN :
978-1-4673-1839-6
