Title :
Improving static performance robustness of thermal processes
Author :
Kabuli, M. Guntekin ; Kosut, Robert L. ; Boyd, Stephen
Author_Institution :
Integrated Syst. Inc., Santa Clara, CA, USA
Abstract :
A static (steady-state) robust control design problem is considered using a nonlinear model of a thermal system. For a given operating point, the control problem is to determine a feedforward/feedback static controller that minimizes the worst-case static peak performance deviation from nominal in the presence of bounded disturbances and parameter variations. It is desired to obtain the tradeoff between the size of the worst-case deviation and the size of the uncertainty set. A complete solution is derived for the static linear control design problem obtained from linearization about selected operating points. Efficient computational tools are developed to rapidly analyze numerous operating points and control configurations
Keywords :
control system synthesis; feedback; feedforward; linearisation techniques; nonlinear control systems; process control; rapid thermal processing; robust control; bounded disturbances; feedforward/feedback static controller; linearization; nonlinear model; static linear control design problem; static performance robustness; steady-state robust control design problem; thermal processes; uncertainty set; worst-case static peak performance deviation; Actuators; Contracts; Control design; Control systems; Feedback; Robust control; Robustness; Semiconductor device modeling; Steady-state; Temperature control;
Conference_Titel :
Decision and Control, 1994., Proceedings of the 33rd IEEE Conference on
Print_ISBN :
0-7803-1968-0
DOI :
10.1109/CDC.1994.411044