Title :
About the synergy between silicon and glass based technologies for advanced optical systems
Author_Institution :
Dept. Optronique, CEA-Grenoble, Grenoble, France
Abstract :
Silicon and glass technologies take more and more place in miniaturized optics both in planar and free space approach. Furthermore, combined with integrated optics and micro-optics, optical MEMS on silicon gives a lot of new opportunities and bring a new dimension for achieving smart hybrid optical sub-systems well in phase with the demand in many fields of application . The presentation try to give a general view on these recent advances and to show how integrated optics on silicon and glass can offer attractive solution to join the requested performances and to relax the well known assembly issue.
Keywords :
elemental semiconductors; glass; micro-optics; micromechanical devices; optical planar waveguides; silicon; Si; glass; integrated optics; micro-optics; optical MEMS; optical systems; silicon; smart hybrid optical sub-systems; Arrayed waveguide gratings; CMOS technology; Glass; High speed optical techniques; Integrated optics; Optical devices; Optical sensors; Optical waveguides; Silicon; Space technology;
Conference_Titel :
TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003
Print_ISBN :
0-7803-7731-1
DOI :
10.1109/SENSOR.2003.1215286
