Title :
THz on-wafer calibration using offset-shorts and known through as standards
Author :
Caglayan, Cosan ; Trichopoulos, Georgios C. ; Sertel, Kubilay
Author_Institution :
ElectroScience Lab., Ohio State Univ., Columbus, OH, USA
Abstract :
We present a novel on-wafer calibration technique using well-defined standards that can be an alternative to widely used multiline-TRL (thru-reflect-line) calibration in millimeter and submillimeter waves. Our method is specifically useful in measurement setups with fixed probes since TRL-type calibration typically requires different physical separation between measurement probes. As on-wafer standards, offset shorts with different electrical delay lengths and a simple through connection are used. Experimental validation of this calibration method is provided in G-Band (140-220 GHz) via measurement of a Beatty standard (mismatched thru) using non-contact probes.
Keywords :
calibration; millimetre wave devices; submillimetre wave devices; terahertz wave devices; Beatty standard; G-band; electrical delay lengths; frequency 140 GHz to 220 GHz; measurement probes; multiline-TRL; noncontact probes; offset-shorts; on-wafer calibration technique; on-wafer standards; physical separation; submillimeter waves; thru-reflect-line calibration; Biomedical measurement; Calibration; Integrated circuit modeling; Mathematical model; Probes; Semiconductor device measurement; Standards; millimeter waves; on-wafer measurements; sub-millimeter waves; terahertz;
Conference_Titel :
Aerospace and Electronics Conference, NAECON 2014 - IEEE National
Print_ISBN :
978-1-4799-4690-7
DOI :
10.1109/NAECON.2014.7045823
