Graphene inductors for high-frequency applications - design, fabrication, characterization, and study of skin effect

Graphene is very attractive for densely integrated and flexible high-frequency/RF IC applications due to its extraordinary electrical, thermal, and mechanical properties. This work presents the design, fabrication, and characterization of graphene on-chip inductors. The skin effect in graphene inductors is investigated experimentally for the first time based on a circuit model proposed and fitted from fabricated ¾-, 2-, and 3-turn spiral inductors. The operation frequencies are in 40-60 GHz range and Q-factors are around 3. Design and fabrication optimizations are performed to guide future studies.