Title :
A high efficiency frequency pre-defined flow-driven energy harvester dominated by on-chip modified Helmholtz Resonating cavity
Author :
Mu, X.J. ; Sun, C.L. ; Ji, H.M. ; Siow, L.Y. ; Zhang, Q.X. ; Zhu, Y. ; Yu, H.B. ; Tao, J.F. ; Gu, Y.D. ; Kwong, D.L.
Author_Institution :
Inst. of Microelectron., A*STAR (Agency for Sci., Technol. & Res.), Singapore, Singapore
Abstract :
We present a novel flow-driven energy harvester with its frequency dominated by on-chip modified Helmholtz Resonating Cavity (HRC). This device harvests pneumatic kinetic energy efficiently and demonstrates a power density of 117.6 μW/cm2, and charging of a 1 μF capacitor in 200 ms.
Keywords :
cavity resonators; energy harvesting; flow; HRC; high efficiency frequency predefined flow-driven energy harvester; on-chip modified Helmholtz resonating cavity; pneumatic kinetic energy harvesting; power density; Acoustics; Capacitors; Cavity resonators; Fluids; III-V semiconductor materials; Resonant frequency; Silicon;
Conference_Titel :
Electron Devices Meeting (IEDM), 2014 IEEE International
DOI :
10.1109/IEDM.2014.7047011
