Title :
Future challenges and opportunities for heterogeneous process technology. Towards the thin films, Zero Intrinsic Variability devices, Zero Power era
Author :
Deleonibus, S. ; Faynot, O. ; Ernst, T. ; Vinet, M. ; Batude, P. ; Andrieu, F. ; Weber, O. ; Cooper, D. ; Bertin, F. ; Moriceau, H. ; DiCioccio, L. ; Signamarcheix, T. ; Sanquer, M. ; Jehl, X. ; Cueto, O. ; Fanet, H. ; Martin, F. ; Okuno, H. ; Nemouchi, F
Author_Institution :
CEA, Univ. Grenoble Alpes, Grenoble, France
Abstract :
Linear scaling CMOS has encountered many hurdles which request new process modules, driven mainly by the maximization of energy efficiency. Fabrication at the sub 10nm node level will request Intrinsic Variability approaching to zero. The rapid growth of mobile, multifunctional and autonomous systems is hardly demanding to reach Zero Power consumption. The solutions to integrate Thin Film based devices, architectures and systems in order to face these challenges are described.
Keywords :
CMOS integrated circuits; optimisation; thin film devices; autonomous system; energy efficiency; heterogeneous process technology; linear scaling CMOS; maximization; mobile system; multifunctional system; size 10 nm; thin film; zero intrinsic variability device; zero power consumption era; CMOS integrated circuits; Energy efficiency; Power demand; Sensors; Silicon; Three-dimensional displays;
Conference_Titel :
Electron Devices Meeting (IEDM), 2014 IEEE International
DOI :
10.1109/IEDM.2014.7047015
