Title :
Ultra-high-Q air-core slab inductors for on-chip power conversion
Author :
Naigang Wang ; Goren, David ; O´Sullivan, Eugene ; Xin Zhang ; Gallagher, William J. ; Herget, Philipp ; Chang, Leland
Author_Institution :
IBM Res. Div., IBM T. J. Watson Res. Center, Yorktown Heights, NY, USA
Abstract :
Air-core slab inductors with specially designed current return paths are proposed to achieve the ultra-high Q required for on-chip power delivery and management at >90% efficiency. Uniquely optimized for buck converter circuits, this CMOS-compatible structure avoids the challenges of thin-film magnetics. Q~25-30 at 200-300MHz is experimentally demonstrated.
Keywords :
CMOS integrated circuits; power convertors; power inductors; CMOS-compatible structure; buck converter circuits; current return paths; frequency 200 MHz to 300 MHz; on-chip power conversion; ultrahigh-Q air-core slab inductors; Inductance; Inductors; Magnetics; Power grids; Resistance; Slabs; System-on-chip;
Conference_Titel :
Electron Devices Meeting (IEDM), 2014 IEEE International
DOI :
10.1109/IEDM.2014.7047037
