DocumentCode :
3565130
Title :
Large-scale fabrication of graphene-based electronic and MEMS devices
Author :
Debin Wang ; He Tian ; Martin-Fernandez, I?±igo ; Yi Yang ; Tian-Ling Ren ; Yuegang Zhang
Author_Institution :
Lawrence Berkeley Nat. Lab., Berkeley, CA, USA
fYear :
2014
Abstract :
Graphene has been demonstrated great potential in electronic and optoelectronic applications. However, the zero band gap of graphene leads to the low on/off ratio in field effect transistors (FETs) and low optical wavelength selectivity in photo detectors. Moreover, the commonly used wet-transfer process for chemical vapor deposited (CVD) graphene could introduce contamination and defects that degrade the graphene device´s performance. These problems could be resolved if we could find a graphene ribbon fabrication method that could precisely control the width, edge structure, as well as registries (location, orientation) on the substrates. Here, we will showcase recent works on novel transfer-free and contaminant-free CVD methods for direct-growth of graphene nanoribbons and microribbons on dielectric substrates.
Keywords :
chemical vapour deposition; field effect transistors; graphene devices; micromechanical devices; photodetectors; C; CVD graphene; FET; MEMS devices; chemical vapor deposited graphene; contaminant-free CVD methods; dielectric substrates; field effect transistors; graphene microribbons; graphene nanoribbons; graphene ribbon; graphene-based electronic; large scale fabrication; low optical wavelength selectivity; photodetectors; transfer-free CVD methods; wet transfer process; zero band gap; Fabrication; Films; Graphene; Nickel; Photodetectors; Substrates; Temperature measurement;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electron Devices Meeting (IEDM), 2014 IEEE International
Type :
conf
DOI :
10.1109/IEDM.2014.7047056
Filename :
7047056
Link To Document :
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