Title :
Nanosystems monolithically integrated with CMOS: emerging applications and technologies
Author :
Arcamone, J. ; Philippe, J. ; Arndt, G. ; Dupre, C. ; Savoye, M. ; Hentz, S. ; Ernst, T. ; Colinet, E. ; Duraffourg, L. ; Ollier, E.
Author_Institution :
Univ. Grenoble Alpes, Grenoble, France
Abstract :
This paper reviews the last major realizations in the field of monolithic integration of NEMS with CMOS. This integration scheme not only drastically improves the efficiency of the electrical detection of the NEMS motion. Our analysis is that it also represents a compulsory milestone to practically implement breakthrough applications of NEMS, such as mass spectrometry, that require large capture cross section (VLSI-arrayed NEMS) and individual addressing (co-integration of NEMS arrays with CMOS for closed-loop operation).
Keywords :
CMOS integrated circuits; VLSI; closed loop systems; mass spectroscopy; nanoelectromechanical devices; CMOS integrated circuit; NEMS motion; VLSI-arrayed NEMS; closed loop operation; compulsory milestone; electrical detection; mass spectrometry; nanosystems monolithic integration; CMOS integrated circuits; CMOS technology; Nanoelectromechanical systems; Oscillators; Sensors; Signal to noise ratio; Silicon;
Conference_Titel :
Electron Devices Meeting (IEDM), 2014 IEEE International
DOI :
10.1109/IEDM.2014.7047098
