Flexible high-performance nonvolatile memory by transferring GAA silicon nanowire SONOS onto a plastic substrate

Flexible nonvolatile memory is demonstrated with excellent memory properties comparable to the traditional wafer-based rigid type of memory. This achievement is realized through the transfer of an ultrathin film consisting of single crystalline silicon nanowire (SiNW) gate-all-around (GAA) SONOS memory devices onto a plastic substrate from a host silicon wafer.