DocumentCode
3565228
Title
Hybrid CMOS/BEOL-NEMS technology for ultra-low-power IC applications
Author
Nuo Xu ; Sun, Jeff ; I-Ru Chen ; Hutin, Louis ; Yenhao Chen ; Fujiki, Jun ; Chuang Qian ; Tsu-Jae King Liu
Author_Institution
Dept. of Electr. Eng. & Comput. Sci., Univ. of California, Berkeley, Berkeley, CA, USA
fYear
2014
Abstract
Three-dimensional (3-D) nano-electro-mechanical (NEM) switches (relays) are proposed to reduce the die area and power consumption of digital logic and memory circuits.
Keywords
CMOS logic circuits; CMOS memory circuits; logic design; low-power electronics; nanoelectromechanical devices; power consumption; relays; three-dimensional integrated circuits; 3D nanoelectromechanical switches; NEM switches; die area; digital logic circuits; hybrid CMOS-BEOL-NEMS technology; memory circuits; power consumption; relays; ultra-low-power IC applications; CMOS integrated circuits; Contacts; Electrodes; Metals; Nanoelectromechanical systems; Relays; Switches;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices Meeting (IEDM), 2014 IEEE International
Type
conf
DOI
10.1109/IEDM.2014.7047130
Filename
7047130
Link To Document