Title :
Multiple breakdown phenomena and modeling for non-uniform dielectric systems
Author :
Wu, Ernest ; Baozhen Li ; Stathis, James H. ; Achanta, Ravi
Author_Institution :
IBM Co. SRDC, Essex Junction, VT, USA
Abstract :
We report a wide range of experimental observations of multiple breakdown (BD) phenomena in BEOL/FEOL/MOL dielectric systems with large variability (non-uniformity). Newly developed successive breakdown theory of time-dependent clustering model can well capture these multiple BD events with and without correlation. The understanding of these effects can potentially lead to much improved and realistic projection for future technology nodes.
Keywords :
electric breakdown; statistical analysis; BEOL dielectric systems; FEOL dielectric systems; MOL dielectric systems; multiple breakdown phenomena; nonuniform dielectric systems; successive breakdown theory; time-dependent clustering model; Correlation; Data models; Dielectrics; Electric breakdown; Mathematical model; Reliability; Stress;
Conference_Titel :
Electron Devices Meeting (IEDM), 2014 IEEE International
DOI :
10.1109/IEDM.2014.7047171
