• DocumentCode
    3565451
  • Title

    Electrical characterization of aluminum interdigitated electrodes for PH sensing application

  • Author

    Azmi, M. Safwan ; Nadzirah, Sh ; Hashim, U.

  • Author_Institution
    Inst. of Nano Electron. Eng., Univ. Malaysia Perlis, Kangar, Malaysia
  • fYear
    2014
  • Firstpage
    493
  • Lastpage
    495
  • Abstract
    The purpose of this paper is to study the electrical characteristics of aluminum interdigitated electrodes (IDE) on silicon substrate for pH sensing application. The IDEs are fabricated using standard photolithography process. It is then tested for each pH groups which are acidic, neutral and basic groups. They are then electrically characterized and their current-voltage curves are obtained.
  • Keywords
    aluminium; bioelectric potentials; biological techniques; biomedical electrodes; pH measurement; photolithography; silicon; Al; IDE electrical characterization; IDE fabrication; aluminum interdigitated electrode; current-voltage curves; pH sensing application; silicon substrate; standard photolithography process; Aluminum; Conferences; Electrodes; Resists; Sensors; Silicon; Standards;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Biomedical Engineering and Sciences (IECBES), 2014 IEEE Conference on
  • Type

    conf

  • DOI
    10.1109/IECBES.2014.7047549
  • Filename
    7047549
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3565451