Title :
Analysis of MEMS diaphragm of piezoresistive intracranial pressure sensor
Author :
Abdul Rahman, S.H. ; Soin, N. ; Ibrahim, F.
Author_Institution :
Dept. of Electr. Eng., Univ. of Malaya, Kuala Lumpur, Malaysia
Abstract :
In the present paper, the design and simulation of square diaphragm, MEMS piezoresistive pressure sensor for intracranial application has been presented. The pressure sensor design presented in this paper consists of a carbon nanotube (CNT) suspended on a square and slotted shaped diaphragm as piezoresistor. The slot was added into the design of the square diaphragm to reduce the residual stress and stiffness of diaphragm. This kind of pressure magnifying scheme is utilized so that placement of the piezoresistor will be on the most sensitive part of the diaphragm, which is at the maximum stress locations on the diaphragm. The static analysis of the system is performed using FEM model of COMSOL Multiphysics. Two sensor designs incorporating square and slotted square diaphragm are implemented and compared to realize the pressure-sensitive components. The pressure sensor has been designed to measure pressures in the range of 0 to 10 mmHg that is in the range of intracranial pressure sensors. The change of resistance of piezoresitors placed on the maximum stress area of slotted square diaphragm was found to be linear with respect to the applied pressure.
Keywords :
bioMEMS; biosensors; bone; carbon nanotubes; diaphragms; nonelectric sensing devices; piezoresistive devices; pressure sensors; CNT pressure sensor; COMSOL Multiphysics model; FEM model; MEMS diaphragm analysis; MEMS piezoresistive pressure sensor; carbon nanotube pressure sensor; diaphragm maximum stress area; diaphragm maximum stress location; diaphragm residual stress; diaphragm stiffness; intracranial application; intracranial pressure sensors; piezoresistive intracranial pressure sensor; piezoresistor placement; piezoresitor resistance; pressure magnifying scheme; pressure sensor design; pressure-sensitive diaphragm components; sensitive diaphragm part; slotted shaped diaphragm; square diaphragm design; square diaphragm simulation; system static analysis; Biomedical engineering; Micromechanical devices; Piezoresistance; Sensitivity; Silicon; Strain; Stress; CNT; Diaphragm; MEMS; Piezoresistive; Pressure sensor;
Conference_Titel :
Biomedical Engineering and Sciences (IECBES), 2014 IEEE Conference on
DOI :
10.1109/IECBES.2014.7047592
