Title :
Surface-grating-based distributed feedback lasers fabricated using nanoimprint lithography
Author :
Viheri?¤l?¤, J. ; Laakso, A. ; Dumitrescu, M. ; Tommila, J. ; Haring, K. ; Leinonen, T. ; Ranta, S. ; Pessa, M.
Author_Institution :
Optoelectron. Res. Centre, Tampere Univ. of Technol., Tampere
Abstract :
Distributed feedback lasers with third-order surface gratings obtained by lateral corrugations of the ridge waveguide have been fabricated using low-cost nanoimprint lithography. The lasers, emitting in the 980 nm wavelength range exhibited stable single-longitudinal-mode operation with side-mode suppression ratios up to 50 dB.
Keywords :
diffraction gratings; distributed feedback lasers; nanolithography; soft lithography; distributed feedback lasers; nanoimprint lithography; ridge waveguide; third-order surface gratings; wavelength 980 nm; Corrugated surfaces; Distributed feedback devices; Etching; Gratings; Laser feedback; Nanolithography; Optical surface waves; Optical waveguides; Surface emitting lasers; Waveguide lasers; distributed feedback lasers; nanoimprint lithography; surface gratings;
Conference_Titel :
Semiconductor Conference, 2008. CAS 2008. International
Print_ISBN :
978-1-4244-2004-9
DOI :
10.1109/SMICND.2008.4703337
