DocumentCode
3565903
Title
Transmission characteristics of a polymer hollow waveguide fabricated by excimer laser direct writing
Author
Ming Chang Shih ; Syuan An Lu ; Jei Tze Luo ; Ching Chuan Hsiao ; Shih Wei Fang
Author_Institution
Dept. of Electr. Eng., Nat. Univ. of Kaohsiung, Kaohsiung, Taiwan
fYear
2014
Firstpage
411
Lastpage
413
Abstract
We demonstrate the fabrication of the polymer hollow waveguide on a Si substrate by excimer laser direct writing and its characteristics of optical transmission. A hollow waveguide with transmission loss of 0.019 dB/ μm had been achieved at wavelength of 1.55 μm. In addition, the effect of coating material to the characteristics of the transmission of the polymer hollow waveguides was presented.
Keywords
antireflection coatings; excimer lasers; light transmission; optical polymers; optical waveguides; Si; Si substrate; coating material; excimer laser direct writing; optical transmission; polymer hollow waveguide; transmission loss; wavelength 1.55 mum; Gold; Hollow waveguides; Laser beams; Optical waveguides; Polymer films; Polymers; Waveguide lasers;
fLanguage
English
Publisher
ieee
Conference_Titel
Microsystems, Packaging, Assembly and Circuits Technology Conference (IMPACT), 2014 9th International
Type
conf
DOI
10.1109/IMPACT.2014.7048414
Filename
7048414
Link To Document