Title :
Design and analysis of multilayer electrothermal actuator for MEMS
Author :
Bharali, Anup Kumar ; Patowari, P.K. ; Baishya, S.
Author_Institution :
Dept. of Mech. Eng., Nat. Inst. of Technol., Silchar, India
Abstract :
Micro-electro-mechanical systems (MEMS) are now days coming up strongly into existence because of their increased performance, high reliability and low material consumption. In this study, a three layer electrothermal MEMS actuator, which is basically a cantilever, has been designed and analyzed using Finite Element analysis software COMSOL™ Multiphysics 3.5. The objective of this analysis is to get better performance in terms of deflection and controlling range of voltage which indicate controllability and reliability.
Keywords :
finite element analysis; microactuators; reliability; COMSOL Multiphysics 3.5 software; MEMS; cantilever; finite element analysis; low material consumption; microelectromechanical systems; multilayer electrothermal actuator analysis; three layer electrothermal MEMS actuator; Conductivity; Micromechanical devices; Stress; MEMS; electrothermal actuator; joule heating effect;
Conference_Titel :
Mechanical and Electronics Engineering (ICMEE), 2010 2nd International Conference on
Print_ISBN :
978-1-4244-7479-0
Electronic_ISBN :
978-1-4244-7481-3
DOI :
10.1109/ICMEE.2010.5558582
