DocumentCode
3567219
Title
Analysis of RF-MEMS switches using finite element-boundary integration with moment method
Author
Wang, Z. ; Jensen, Bjoern ; Volakis, J. ; Saitou, K. ; Kurabayashi, Katsuo
Author_Institution
Michigan Univ., Ann Arbor, MI, USA
Volume
2
fYear
2003
Firstpage
173
Abstract
This paper presents a new hybrid methodology for modeling RF-MEMS switches. This method combines the usual finite element-boundary integration (FE-BI) method for the fixed section of the switch, and the method of moments for the movable beam. This approach is intended to address the large 100:1 scale variation within a single computational domain, which also spans a very small fraction of a wavelength.
Keywords
boundary integral equations; finite element analysis; method of moments; microswitches; FE-BI method; FEM; MOM; RF-MEMS switches; boundary integrals; finite element method; finite element-boundary integration; method of moments; movable beam; radio-frequency microelectromechanical systems; switch fixed section; Bismuth; Electromagnetic modeling; Finite difference methods; Finite element methods; Message-oriented middleware; Microswitches; Moment methods; Radiofrequency microelectromechanical systems; Switches; Time domain analysis;
fLanguage
English
Publisher
ieee
Conference_Titel
Antennas and Propagation Society International Symposium, 2003. IEEE
Print_ISBN
0-7803-7846-6
Type
conf
DOI
10.1109/APS.2003.1219206
Filename
1219206
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