ESD risk evaluation of automatic semiconductor process equipment — A new guideline of the German ESD Forum e.V.

While existing standards and guidelines mainly deal with standard requirements for EPAs and ESD-protected workplaces, only few recommendations exist for machines. Increasing ESD-requirements of new semiconductor products requested to provide useful information for machine manufacturers and ESD coordinators as well. The German ESD Forum e.V. developed new guidelines based on practical experience of experts and theoretical considerations on charging and discharging mechanisms as well.