Title :
High resolution PEA charge distribution measurement system
Author :
Maeno, Takashi ; Fukunaga, Kaori ; Takada, Tatsuo
Author_Institution :
Communication Res. Lab., Tokyo, Japan
Abstract :
The pulsed electroacoustic (PEA) method is widely known to be an excellent method for the measurement of the space charge distribution which accumulates in thick dielectric materials (1-5 mm). However, because of its lower resolution in the depth direction, conventional application of this method is less suitable for thin specimens than the laser-induced pressure wave method. A new PEA measurement system which can now be applied to thin dielectric materials (<100 μm). The resolution in the depth direction is improved to less than several μm by detecting signals in a wide frequency range. In addition, the system employs a deconvolution technique with FFT in order to compensate for the frequency characteristics of the piezoelectric sensor. The new PEA measurement system is expected to be useful for quantitative and non-destructive measurement of the space charge distribution in dielectric films
Keywords :
acoustoelectric transducers; 100 mum; FFT deconvolution technique; depth direction resolution; high resolution measurement; nondestructive measurement; phase compensation; piezoelectric sensor frequency characteristics compensation; pulsed electroacoustic method; quantitative measurement; space charge distribution measurement; surface charge distribution; thin dielectric materials; wide frequency range signal detection; Charge measurement; Current measurement; Dielectric materials; Dielectric measurements; Frequency; Pulse measurements; Pulsed electroacoustic methods; Signal resolution; Space charge; Thickness measurement;
Conference_Titel :
Electrical Insulation and Dielectric Phenomena, 1994., IEEE 1994 Annual Report., Conference on
Print_ISBN :
0-7803-1950-8
DOI :
10.1109/CEIDP.1994.591742
