DocumentCode
3568391
Title
Agent-based scheduling mechanism for semiconductor manufacturing systems with temporal constraints
Author
Yoon, Hyun Joong ; Shen, Weiming
Author_Institution
Integrated Manuf. Technol. Inst., National Res. Council Canada, London, Ont., Canada
Volume
2
fYear
2005
Firstpage
1123
Abstract
This paper addresses a multi-agent based scheduling mechanism for semiconductor manufacturing systems with hard inter-operation temporal constraints. The multi-agent architecture consists of scheduling agents, workcell agents, machine agents, and product agents. A dynamic planning-based approach is adopted for the scheduling mechanism so that dynamic behaviors of the system can be considered. The scheduling agents compute optimal schedules through a bidding mechanism with the workcell agents. The proposed scheduling mechanism uses a temporal constraint set formalism to obtain a feasible schedule in polynomial steps.
Keywords
integrated circuit manufacture; manufacturing systems; multi-agent systems; scheduling; semiconductor device manufacture; dynamic planning; machine agents; multiagent based scheduling; product agents; real-time scheduling; scheduling agents; semiconductor manufacturing systems; temporal constraints; workcell agents; Computer science; Dynamic scheduling; Furnaces; Job shop scheduling; Manufacturing systems; Operations research; Optimal scheduling; Processor scheduling; Real time systems; Semiconductor device manufacture;
fLanguage
English
Publisher
ieee
Conference_Titel
Mechatronics and Automation, 2005 IEEE International Conference
Print_ISBN
0-7803-9044-X
Type
conf
DOI
10.1109/ICMA.2005.1626709
Filename
1626709
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