• DocumentCode
    3568391
  • Title

    Agent-based scheduling mechanism for semiconductor manufacturing systems with temporal constraints

  • Author

    Yoon, Hyun Joong ; Shen, Weiming

  • Author_Institution
    Integrated Manuf. Technol. Inst., National Res. Council Canada, London, Ont., Canada
  • Volume
    2
  • fYear
    2005
  • Firstpage
    1123
  • Abstract
    This paper addresses a multi-agent based scheduling mechanism for semiconductor manufacturing systems with hard inter-operation temporal constraints. The multi-agent architecture consists of scheduling agents, workcell agents, machine agents, and product agents. A dynamic planning-based approach is adopted for the scheduling mechanism so that dynamic behaviors of the system can be considered. The scheduling agents compute optimal schedules through a bidding mechanism with the workcell agents. The proposed scheduling mechanism uses a temporal constraint set formalism to obtain a feasible schedule in polynomial steps.
  • Keywords
    integrated circuit manufacture; manufacturing systems; multi-agent systems; scheduling; semiconductor device manufacture; dynamic planning; machine agents; multiagent based scheduling; product agents; real-time scheduling; scheduling agents; semiconductor manufacturing systems; temporal constraints; workcell agents; Computer science; Dynamic scheduling; Furnaces; Job shop scheduling; Manufacturing systems; Operations research; Optimal scheduling; Processor scheduling; Real time systems; Semiconductor device manufacture;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Mechatronics and Automation, 2005 IEEE International Conference
  • Print_ISBN
    0-7803-9044-X
  • Type

    conf

  • DOI
    10.1109/ICMA.2005.1626709
  • Filename
    1626709