Mechatronic design of RF MEMS switches for communication applications

Author

Lai, Yeong-Lin ; Wen, Yi-De

Author_Institution

Dept. of Mechatronics Eng., Nat. Changhua Univ. of Educ., Taiwan

Volume

1

fYear

2004

Abstract

In this paper, we present mechatronic design of RF microelectromechanical system (MEMS) switches. The design is conducted by both the mechanical and electromagnetic schemes on the basis of the finite element method and the full-wave electromagnetic simulation. The relationship among the microelectromechanical characteristics, such as effective stiffness constant, displacement, insertion loss, return loss, and isolation, and switch structures are investigated. The comprehensive mechatronic study of the RF MEMS switches provides a systematic design methodology for RFIC applications.

Keywords

finite element analysis; mechatronics; microswitches; microwave switches; telecommunication equipment; Ansoft HFSS simulator; RF MEMS switches; RF microelectromechanical system switches; RFIC applications; communication applications; finite element method; full wave electromagnetic simulation; mechatronic design; microelectromechanical characteristics; Bridge circuits; Communication switching; Coplanar waveguides; Design methodology; Insertion loss; Mechatronics; Power transmission lines; Radio frequency; Radiofrequency microelectromechanical systems; Switches;

fLanguage

English

Publisher

ieee

Conference_Titel

Circuits and Systems, 2004. MWSCAS '04. The 2004 47th Midwest Symposium on

Print_ISBN

0-7803-8346-X

Type

conf

DOI

10.1109/MWSCAS.2004.1354003

Filename

1354003