High resolution NEMS smart audio sensor based on resistive silicon nano wires for hearing aids

This paper presents a smart sensor microphone based on silicon nanowire resistive gauge for hearing aid applications through cochlear implant. The system includes the sensor together with its bias circuit, the preconditioning stage and the digital interface that ease integration on heterogenic system. One important concern of audio field is the wide dynamic range addressed since human hear is able to sense sound pressure level ranging from μPa to a few Pa. The hundred dB dynamic range circuit was designed to achieve the maximum resolution with a deep submicron CMOS technology suitable for implementation of extensive digital signal processing required in most today´s application. Power consumption issue involved by application requirement is addressed with usual trade off related to embedded device. This is done at system level with a topology optimization.