Title :
Restoration algorithm of the depth distribution of electrophysical properties of semiconductors in microwave microscopy
Author :
Gordienko, Yu.E. ; Larkin, S.Yu. ; Melnyk, S.I. ; Slipchenko, N.I.
Author_Institution :
Kharkiv Nat. Univ. of Radio Electron., Kharkiv, Ukraine
Abstract :
Restoration algorithm of the depth distribution of the electrical properties of semiconductor materials and products in the method of microwave scanning is studied. In order to process the information obtained by varying the thickness of the air gap, an iterative method of successive perturbations is used.
Keywords :
air gaps; iterative methods; microwave devices; microwave imaging; perturbation theory; semiconductor materials; air gap thickness; depth distribution; iterative method; microwave microscopy; microwave scanning method; perturbation method; restoration algorithm; semiconductor material electrophysical properties; Abstracts; Iterative methods; Microwave FET integrated circuits; Microwave imaging; Microwave integrated circuits; Microwave technology;
Conference_Titel :
Microwave and Telecommunication Technology (CriMiCo), 2012 22nd International Crimean Conference
Print_ISBN :
978-1-4673-1199-1
