Title :
3D nanoassembly of carbon nanotubes through nanorobotic manipulations
Author :
Dong, Lixin ; Arai, Fumihito ; Fukuda, Toshio
Author_Institution :
Dept. of Micro Syst. Eng., Nagoya Univ., Japan
fDate :
6/24/1905 12:00:00 AM
Abstract :
Nanoassembly of multi-walled carbon nanotubes (MWNTs) in three-dimensional space is realized by positioning these building blocks with nanometer order accuracy, joining them together through van der Waals forces, and fixing them with electron-beam-induced deposition (EBID) or chemical bonds through mechanochemical nanorobotic manipulations. MWNT I-junctions and Y-junctions are constructed. For parallel nanoassembly, the concept of parallel EBID is presented, a MWNT electron-beam emitter is prepared through nanoassembly of MWNTs onto commercially available atomic force microscope (AFM) cantilevers, and the feasibility of using them for parallel EBID is investigated.
Keywords :
atomic force microscopy; carbon nanotubes; electron beam deposition; micromanipulators; nanotechnology; 3D nanoassembly; I-junctions; Y-junctions; atomic force microscope cantilevers; chemical bonds; electron-beam-induced deposition; molecular nanotechnology; multi-walled carbon nanotubes; nanometer order accuracy; nanorobotic manipulations; parallel nanoassembly; positioning; van der Waals forces; Atomic force microscopy; Atomic layer deposition; Carbon nanotubes; Cathodes; Electron microscopy; Mechanical factors; Nanostructures; Scanning electron microscopy; Systems engineering and theory; Voltage;
Conference_Titel :
Robotics and Automation, 2002. Proceedings. ICRA '02. IEEE International Conference on
Print_ISBN :
0-7803-7272-7
DOI :
10.1109/ROBOT.2002.1014752
