High Performance Bi-CMOS Technology and its Applications

This paper describes a high performance Bi-CMOS technology, Hi-BiCMOS, and its applications to VLSIs. By combining bipolar and CMOS devices in unit circuits of VLSIs, Hi-BiCMOS provides both speed performance competitive with bipolar LSIs and integration density close to that of CMOS LSIs. Hi-BiCMOS technology has been successfully used for static RAMs and gate arrays. Effectiveness of its applications to some types of processors has also been examined by evaluating test chips.