DocumentCode
3572477
Title
An analytical model for the optimization of High Injection MOS Flash E2PROM devices
Author
Van Houdt, J. ; Groeseneken, G. ; Maes, H.E.
Author_Institution
IMEC vzw, Kapeldreef 75, B-3001 Leuven, Belgium
fYear
1992
Firstpage
257
Lastpage
260
Abstract
In this paper, an analytical model is described which can be used for the optimization of High Injection MOS devices [1,2]. The model determines the unknown potentials inside the split gate structure and therefrom calculates the transient characteristics using the Lucky Electron Model (LEM) [3]. In the high injection regime, the model shows an excellent agreement with measured characteristics. This enables us to predict the programming speed and the threshold window for different voltages and device geometries, which is necessary for an adequate device optimization.
Keywords
Analytical models; Character generation; Current measurement; Electrons; Geometry; Hot carrier injection; MOS devices; Microelectronics; Nonvolatile memory; Threshold voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid State Device Research Conference, 1992. ESSDERC '92. 22nd European
Print_ISBN
444894780
Type
conf
Filename
5435175
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