A MEMS X-type plane micro-cantilever stiffness research

The closed X-type micro-electromechanical systems (MEMS) cantilever was designed and the mechanical analysis model was established, the coefficient of elasticity of the cantilever was derived by using the card´s second of energy method law and Hooke´s law. The relative error in the ANSYS finite element simulation did not beyond the allowable range. The spring constant were researched by changing cantilever´s various structural parameters in the linear range. The study results provide a theoretical basis for the design and optimization of other closed type of plane micro cantilever.