High-precision control of X-Y table using experimental evolutionary programming-based scheme

This paper proposes a high-precision control scheme for a precise point-to-point positioning system, called an X-Y table, even under the influence of friction, deadzone, saturation, etc. The proposed scheme is basically composed of a fuzzy precompensator and a PD controller. The fuzzy precompensator is employed to improve the performance of the PD controller. Its fuzzy rules are obtained from experimental evolutionary programming (EEP), not from an expert. The effectiveness of the scheme is demonstrated by experiments on an X-Y table, with a positioning error of within 1 μm and a dwell time of 0.15 s at the goal position