Improved variable EWMA controller design

Author

Ming-Da Ma ; Jia-Yi Li ; Kai Zhang

Author_Institution

Center for Control & Guidance Technol., Harbin Inst. of Technol., Harbin, China

fYear

2014

Firstpage

4316

Lastpage

4320

Abstract

The exponentially weighted moving average (EWMA) controller is a popular run-to-run (RtR) control scheme in semiconductor manufacturing because of its effectiveness and simplicity. In this paper we propose an improved variable EWMA controller design method. The optimal discount factor of the EWMA controller is determined by minimizing the mean square error (MSE) of process output at each run. The proposed method overcomes some potential problems of Tseng´s method and can be applied to general autoregressive integrated moving average (ARIMA) processes. Simulation examples are given to show the effectiveness of the proposed method.

Keywords

autoregressive moving average processes; control system synthesis; semiconductor device manufacture; ARIMA process; MSE; RtR control scheme; autoregressive integrated moving average process; exponentially weighted moving average; mean square error minimization; optimal discount factor; run-to-run control scheme; semiconductor manufacturing; variable EWMA controller design; Control systems; Design methodology; Equations; Manufacturing; Mean square error methods; Process control; Stability analysis; EWMA; Run-to-run control; semiconductor manufacturing; variable discount factor;

fLanguage

English

Publisher

ieee

Conference_Titel

Intelligent Control and Automation (WCICA), 2014 11th World Congress on

Type

conf

DOI

10.1109/WCICA.2014.7053439

Filename

7053439