Title :
Conjugated Polymers for CMOS Compatible Applications
Author :
M?¼ller, J. ; Mankowski, V. ; Hilleringmann, U. ; Goser, K. ; Holmes, A. ; Gelsen, O. ; Stern, R.
Author_Institution :
Dortmund University, ET-BE, 44221 Dortmund, Germany. e-mail: mueller@luzi.e-technik.uni-dortmund.de
Abstract :
In the last years, several new materials and processes for efficient liglht emission in silicon based optoelectronics have been investigated /3/,/6/,/7/. In this paper, the use of light emitting conjugated polymers in a silicon teclnology environment is discussed. Light emitting diodes (LEDs) have been built and tested on different types of silicon substrates (n+, p+, polysilicon). Spectrum analysis, current-voltage and intensity-voltage measurements have been carried out for device characterization. The processing of the devices applies only steps typically for MOS-technology, including selective plasma etching of metal and polymer films. First examples of monolithic integration of microelectronic analogue and digital circuits in combination with polymer LEDs on one silicon chip are given, they may offer new applications in the field of display technology.
Keywords :
Current measurement; Integrated circuit measurements; Light emitting diodes; Plasma applications; Plasma displays; Plasma measurements; Polymers; Semiconductor device measurement; Silicon; Testing;
Conference_Titel :
Solid State Device Research Conference, 1995. ESSDERC '95. Proceedings of the 25th European
