Title :
Estimating states in an unobservable system
Author :
Chun-cheng Chang ; Toprac, Anthony J. ; Chang-xin Liu ; Edgar, Thomas F. ; Shi-shang Jang
Author_Institution :
Dept. of Chem. Eng., Nat. Tsing Hua Univ., Hsinchu, Taiwan
Abstract :
Run-to-Run control methods as applied in semiconductor manufacturing can greatly benefit from partitioning the observed disturbance state into separate components of tool and product disturbance states. Obtaining sufficiently accurate initial estimates of tool and product disturbance terms from historical data greatly improves the effectiveness of this method. Such an estimation method is developed in this work based on the just-in-time adaptive disturbance estimator (JADE) using random, high frequency sampling of historical data.
Keywords :
just-in-time; observability; sampling methods; semiconductor device manufacture; state estimation; JADE; high frequency sampling; just-in-time adaptive disturbance estimator; observed disturbance state; product disturbance states; run-to-run control methods; semiconductor manufacturing; states estimation; tool disturbance states; unobservable system; Accuracy; Context; Data models; Estimation; Frequency estimation; Mathematical model; Process control; JADE; high-mix semiconductor manufacturing; just-in-time adaptive disturbance estimation; run to run control; state estimates;
Conference_Titel :
Intelligent Control and Automation (WCICA), 2014 11th World Congress on
DOI :
10.1109/WCICA.2014.7053690
