DocumentCode :
3574520
Title :
Signal conditioning unit for piezoresistive based micro pressure sensors
Author :
Sonkar, Shailendra Kumar ; Suja, K.J. ; Swapna Krishnan, J.
Author_Institution :
Dept. of ECE, NIT Calicut, Calicut, India
fYear :
2014
Firstpage :
1279
Lastpage :
1283
Abstract :
Silicon piezoresistors are widely used in fabrication of micro pressure sensors and accelerometers. The problem associated with silicon based piezoresistive micro sensors is the dependency of resistance on temperature resulting in large thermal drift. This project is aiming to design a low cost signal conditioner to compensate the thermal drift prevailing inherently in the piezoresistive pressure sensors configured in Wheatstone bridge structure. This method provides digital approach to compensate thermal drift having better performance than Analog approach. Using the signal conditioner linearity improvement and offset compensation is achieved at the desired sensitivity.
Keywords :
accelerometers; compensation; microfabrication; microsensors; piezoresistive devices; pressure sensors; signal conditioning circuits; silicon; Si; Wheatstone bridge structure; accelerometer; offset compensation; signal conditioner linearity improvement; signal conditioning unit; silicon based piezoresistive pressure microsensor fabrication; thermal drift compensation; Calibration; Interpolation; Piezoresistance; Sensitivity; Temperature; Temperature sensors; MPX10GP; interpolation method; percentage error; piezoresistive sensor; sensitivity; temperature compensation;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Circuit, Power and Computing Technologies (ICCPCT), 2014 International Conference on
Print_ISBN :
978-1-4799-2395-3
Type :
conf
DOI :
10.1109/ICCPCT.2014.7055013
Filename :
7055013
Link To Document :
بازگشت