Title :
Characterization of capacitive micromachined ultrasonic transducers
Author :
Lardies, Joseph ; Bellared, Faycal ; Belgacem, Brahim ; Bourbon, Gilles ; Le Moal, Patrice ; Walter, Vincent
Author_Institution :
Inst. FEMTO-ST, Besançon, France
Abstract :
This communication describes numerical and experimental characterization of CMUTs for ultrasound transmission. Simulations based on finite elements method to model CMUTs electromechanical behaviour and to determine the dimensions of elementary cells are presented. In particular we analyze the collapse voltage variations for different parameters of a circular cell and the capacitance variations for different bias voltages. We report the deformations of non-metallized and metallized membranes and we determine eigenfrequencies, bandwidth and quality factors of cells. The fabrication of CMUTs is based on the anodic bonding of a SOI wafer on a borosilicate glass substrate and we compare experimental results with numerical results.
Keywords :
anodisation; bonding processes; capacitance measurement; capacitive sensors; deformation; membranes; micromachining; microsensors; ultrasonic transducers; CMUT; SOI wafer; anodic bonding; borosilicate glass substrate; capacitive micromachined ultrasonic transducer; circular cell; eigenfrequency; electromechanical behaviour; elementary cell; finite element method; metallized membrane deformation; nonmetallized membrane deformation; numerical characterization; ultrasound transmission; Bandwidth; Capacitance; Electrodes; Finite element analysis; Resonant frequency; Silicon; Voltage measurement; CMUTs; capacitance variations; collapse voltage; fill factors;
Conference_Titel :
Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2014 Symposium on
Print_ISBN :
978-2-35500-028-7
DOI :
10.1109/DTIP.2014.7056635
