Title :
Fabrication and micromechanical characterization of polycrystalline diamond microcantilevers
Author :
Possas, Maira ; Rousseau, Lionel ; Ghassemi, Farbod ; Lissorgues, Gaelle ; Scorsone, Emmanuel ; Bergonzo, Philippe
Author_Institution :
ESYCOM, Univ. Paris-Est, Noisy le Grand, France
Abstract :
The exceptional chemical, mechanical and thermal properties of diamond make this material the ideal choice for resonant MEMS. Cantilevers designed for biochemical applications have been fabricated using CVD diamond. In this work, the mechanical properties of these cantilevers were investigated by two different techniques: bending test using a Contact Surface Profilometer and resonant test, using a Laser Doppler Vibrometer. The Young´s Modulus mean value of polycrystalline diamond cantilever was estimated from these tests at 950-1100GPa.
Keywords :
CVD coatings; Young´s modulus; bioMEMS; cantilevers; diamond; microfabrication; C; CVD diamond; Young modulus; bending test; biochemical applications; contact surface profilometer; laser Doppler vibrometer; microcantilever fabrication; micromechanical characterization; polycrystalline diamond cantilever; polycrystalline diamond microcantilever; pressure 950 GPa to 1100 GPa; resonant MEMS; resonant test; Diamonds; Fabrication; Force; Materials; Micromechanical devices; Resonant frequency; Microcantilevers; Micromechanical test; Polycrystalline Diamond; Surface Profilometer; Young´s modulus;
Conference_Titel :
Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2014 Symposium on
Print_ISBN :
978-2-35500-028-7
DOI :
10.1109/DTIP.2014.7056658
