Title :
Electrostatically-induced modal crosstalk phenomena in resonant MEMS sensors
Author :
Brenes, A. ; Juillard, J. ; dos Santos, F. Vinci
Author_Institution :
THALES Avionics, Valence, France
Abstract :
The aim of this paper is to introduce an explanation for the amplitude saturation and inhibition phenomena in resonant MEMS pressure sensors, via the electrostatic coupling of two resonance modes. Our analysis and experimental results reveal that these phenomena may be ubiquitous in electrostatic resonant MEMS sensors.
Keywords :
crosstalk; microsensors; pressure sensors; electrostatic coupling; electrostatically-induced modal crosstalk phenomena; resonance modes; resonant MEMS pressure sensors; Couplings; Electrostatics; Mathematical model; Micromechanical devices; Oscillators; Sensor phenomena and characterization; Autoparametric resonance; electrostatic nonlinearity;
Conference_Titel :
Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2014 Symposium on
Print_ISBN :
978-2-35500-028-7
DOI :
10.1109/DTIP.2014.7056659
