Title :
Analytic design method for distributed RF MEMS phase shifters
Author :
Lucibello, A. ; Proietti, E. ; Marcelli, R. ; Bartolucci, G. ; de Angelis, G.
Author_Institution :
Inst. for Microelectron. & Microsyst., IMM Roma, Rome, Italy
Abstract :
This paper presents the design of distributed MEMS phase shifters by means of the image-parameters method. The proposed analytic approach utilizes a more precise modeling of the MEMS device with respect to that one usually adopted in literature. The most important analytic aspects concerning the synthesis technique are presented. As a demonstration of the method a structure characterized by a differential phase shift value of 90° is designed and simulated, exhibiting very good electric performance.
Keywords :
micromechanical devices; microwave phase shifters; network synthesis; radiofrequency integrated circuits; RF MEMS; analytic design method; differential phase shift value; distributed microwave phase shifters; electric performance; image-parameter method; structure characterization; synthesis technique; Micromechanical devices; Microwave circuits; Microwave imaging; Phase shifters; Radio frequency; Varactors; MEMS varactor; distributed phase shifter; image parameter; microwave;
Conference_Titel :
Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2014 Symposium on
Print_ISBN :
978-2-35500-028-7
DOI :
10.1109/DTIP.2014.7056678
