• DocumentCode
    3574994
  • Title

    Analytic design method for distributed RF MEMS phase shifters

  • Author

    Lucibello, A. ; Proietti, E. ; Marcelli, R. ; Bartolucci, G. ; de Angelis, G.

  • Author_Institution
    Inst. for Microelectron. & Microsyst., IMM Roma, Rome, Italy
  • fYear
    2014
  • Firstpage
    1
  • Lastpage
    3
  • Abstract
    This paper presents the design of distributed MEMS phase shifters by means of the image-parameters method. The proposed analytic approach utilizes a more precise modeling of the MEMS device with respect to that one usually adopted in literature. The most important analytic aspects concerning the synthesis technique are presented. As a demonstration of the method a structure characterized by a differential phase shift value of 90° is designed and simulated, exhibiting very good electric performance.
  • Keywords
    micromechanical devices; microwave phase shifters; network synthesis; radiofrequency integrated circuits; RF MEMS; analytic design method; differential phase shift value; distributed microwave phase shifters; electric performance; image-parameter method; structure characterization; synthesis technique; Micromechanical devices; Microwave circuits; Microwave imaging; Phase shifters; Radio frequency; Varactors; MEMS varactor; distributed phase shifter; image parameter; microwave;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2014 Symposium on
  • Print_ISBN
    978-2-35500-028-7
  • Type

    conf

  • DOI
    10.1109/DTIP.2014.7056678
  • Filename
    7056678
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3574994