The nonlinear dynamics of a micro-scale electrostatic vibration energy harvester

This work presents a review of an electrostatic vibration energy harvester (eVEH) which lends itself to micro-scale implementation using MEMS technology. This is a fundamental system which has two modes of operation, constant-charge or constant-voltage. It is an inherently nonlinear system which displays both classic nonlinear behaviour along with sliding behaviour regardless of mode of operation. The appearance of this behaviour is explained and techniques to study it are introduced. These not only provide fundamental information about eVEHs but also aid MEMS/NEMS designers with future designs of such systems.