Title :
Detection of micro-beads by impedance spectroscopy: Towards a wholly integrated electronic device for biological cells applications
Author :
Tixier-Mita, Agnes ; Takahashi, Takuya ; Fujita, Hiroyuki ; Toshiyoshi, Hiroshi ; Mori, Isao ; Mita, Yoshio ; Francais, Olivier ; Le Pioufle, Bruno
Author_Institution :
Center for Int. Res. on Micronano, Mechatron., Univ. of Tokyo, Tokyo, Japan
Abstract :
The purpose of this article is to present first results of electrical detection of micro-beads, using impedance spectroscopy technique, with a wholly integrated device. The whole integration concerns as well the electronics as the micro-fluidic integration inside a LSI device, by post-processing. The results are first steps in the development of this wholly integrated device, intended to be for biological cells analyses.
Keywords :
bioMEMS; cellular biophysics; electric impedance; large scale integration; microchannel flow; LSI device; biological cell analysis; impedance spectroscopy technique; micro-bead electrical detection; microfluidic integration; wholly integrated electronic device; Electrodes; Frequency measurement; Impedance; Impedance measurement; Large scale integration; Performance evaluation; Silicon; bio-LSI; cells electrical analyses; impedance spectroscopy; micro-beads electrical detection; micro-fluidic channel integration;
Conference_Titel :
Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2014 Symposium on
Print_ISBN :
978-2-35500-028-7
DOI :
10.1109/DTIP.2014.7056696
