Title :
A thermal driven microactuator for hard disk drive
Author :
Seong-Hun Choe ; Tomotsune, H. ; Eguchi, T. ; Kanamaru, M. ; Aono, T. ; Nakamura, S. ; Koide, A.
Author_Institution :
Mech. Eng. Res. Lab., Hitachi Ltd., Hitachinaka, Japan
Abstract :
This paper presents an electro-thermal microactuator for a dual stage actuation scheme. The size of the microactuator is 1.5×1.3×0.3 mm3. Power consumption was 5.8mW when the applied voltage was 3.5+/-3.5V from DC to 100 kHz. The resonant frequency was designed to be 36 kHz, and the achieve value was 33 kHz. We also developed a frequency response model of this microactuator and found that our model coincided well with experimental results.
Keywords :
disc drives; frequency response; hard discs; microactuators; dual stage actuation scheme; electro-thermal microactuator; frequency response model; hard disk drive; power consumption; resonant frequency; thermal driven microactuator; Mechanical variables measurement; Dual stage actuator; Hard disk drive; Thermal actuator;
Conference_Titel :
APMRC, 2010 Digest
Print_ISBN :
978-1-4244-8103-3
