Title :
EXAFS study of intermixing in GaN/AlN quantum wells
Author :
Zhuravlev, K. ; Alexandrov, I. ; Malin, T. ; Mansurov, V. ; Trubina, S. ; Erenburg, S. ; Dobos, L. ; Pecz, B.
Author_Institution :
Rzhanov Inst. of Semicond. Phys., Novosibirsk, Russia
Abstract :
Extended X-ray absorption fine structure above the GaK edge has been used to study the local structure of heterointerfaces in GaN/AlN multiple quantum wells (MQWs) grown with ammonia molecular beam epitaxy at different growth temperatures. Thickness of AlN and GaN layers in MQWs were evaluated using transmission electron microscopy and photoluminescence spectroscopy. The Ga-Ga interatomic distance in MQWs is lower than that in bulk GaN due to elastic compression of GaN layers in MQWs. The number of Ga cations in the second coordination shell of Ga atoms is lower than that predicted for abrupt heterointerfaces that is an evidence for intermixing of heterointerfaces. A degree of intermixing linearly rises with an increase in the growth temperature.
Keywords :
EXAFS; III-V semiconductors; aluminium compounds; chemical interdiffusion; gallium compounds; molecular beam epitaxial growth; photoluminescence; semiconductor epitaxial layers; semiconductor growth; semiconductor heterojunctions; semiconductor quantum wells; transmission electron microscopy; wide band gap semiconductors; EXAFS; Ga cations; Ga-Ga interatomic distance; GaN-AlN; GaN/AlN multiple quantum wells; ammonia molecular beam epitaxy; elastic compression; extended X-ray absorption fine structure; growth temperature; intermixing; layer thickness; photoluminescence spectroscopy; transmission electron microscopy; Aluminum gallium nitride; Atomic layer deposition; Gallium; Gallium nitride; III-V semiconductor materials; Molecular beam epitaxial growth; Quantum well devices; EXAFS spectroscopy; GaN/AlN; intermixing; quantum wells;
Conference_Titel :
Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO), 2014 International Conference on
DOI :
10.1109/3M-NANO.2014.7057321