Modeling V-shape Thermal In-plane Microactuator using Chained Beam-Constraint-Model

Thermal actuation has seen its wide use in micro scale devices. Because it is simple in structure and easy to be fabricated and to be integrated in microelectromechanical systems (MEMS), the V-shape Thermal In-plane Microactuator (TIM) is one of most commonly used thermal actuators. It can provide large stroke and large force through constraint thermal expansion. Different buckling modes may occur during actuation due to the constraint expansion deflections of the flexible legs. In this work, the Chained Beam-Constraint-Model (CBCM) was employed as the tool for modeling the deflections of the legs of TIM due to its capability of accurately modeling large and complicated deflections of flexible beams. Two TIM designs were analyzed and the comparison with FEA and experimental results demonstrate the effectiveness of the presented model. The load capability of the TIM designs were also characterized.