• DocumentCode
    3578107
  • Title

    A reliable MEMS gyroscope with optimization design for closed loop control of the sense mode

  • Author

    Chunhua He ; Qinwen Huang ; Yunfei En ; Qiancheng Zhao ; Zhenchuan Yang ; Guizhen Yan

  • Author_Institution
    No. 5 Electron. Res. Inst., Sci. & Technol. of Reliability Phys. & Applic. of Electron. Component Lab., Minist. of Ind. & Inf. Technol., Guangzhou, China
  • fYear
    2014
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    This paper presents a novel optimization design method for the closed loop control of the sense mode of a MEMS gyroscope, which aims at improving the performances and reliability of the control system.
  • Keywords
    closed loop systems; gyroscopes; micromechanical devices; optimisation; reliability; MEMS gyroscope; closed loop control; control system reliability; optimization design; sense mode; Estimation; Fabrication; Gyroscopes; Micromechanical devices; Optimization; Reliability engineering; MEMS gyroscope; fuzzy logic; optimization design; reliability;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices and Solid-State Circuits (EDSSC), 2014 IEEE International Conference on
  • Type

    conf

  • DOI
    10.1109/EDSSC.2014.7061183
  • Filename
    7061183
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3578107