Title :
A novel pressure sensor design for low pressure ranges
Author :
Xian Huang ; Jun He ; Li Zhang ; Fang Yang ; Dacheng Zhang
Author_Institution :
Shenzhen Grad. Sch., Peking Univ., Shenzhen, China
Abstract :
This paper discussed a novel design of the piezoresistive pressure sensor with high sensitivity and high linearity. Partially structured diaphragm with four peninsulas and a center boss was applied to improve the sensor performance for low pressure measurement. Finite element analysis (FEA) was applied to evaluate the sensor design. Simulation results indicated that a sensitivity of 25.3 mV/V full-scale output and a nonlinearity error of 0.11 %FSS in the pressure range 0-5 kPa. Through comparisons with other typical sensors, the proposed sensor design exhibited the best overall performance.
Keywords :
diaphragms; finite element analysis; piezoresistive devices; pressure measurement; pressure sensors; FEA; diaphragm; finite element analysis; piezoresistive pressure sensor design; pressure 0 kPa to 5 kPa; pressure measurement; Educational institutions; Linearity; Loading; Piezoresistance; Pressure measurement; Sensitivity; Stress; peninsulas and center boss; piezoresistive pressure sensor; sensitivity and linearity; structured diaphragm;
Conference_Titel :
Electron Devices and Solid-State Circuits (EDSSC), 2014 IEEE International Conference on
DOI :
10.1109/EDSSC.2014.7061188
