A novel pressure sensor design for low pressure ranges

This paper discussed a novel design of the piezoresistive pressure sensor with high sensitivity and high linearity. Partially structured diaphragm with four peninsulas and a center boss was applied to improve the sensor performance for low pressure measurement. Finite element analysis (FEA) was applied to evaluate the sensor design. Simulation results indicated that a sensitivity of 25.3 mV/V full-scale output and a nonlinearity error of 0.11 %FSS in the pressure range 0-5 kPa. Through comparisons with other typical sensors, the proposed sensor design exhibited the best overall performance.