A novel piezoresistive accelerometer featuring in-plane vibration

A novel approach is proposed for in-plane acceleration measurement using a novel clamped-beam structure as the sensing element. The working principle depends on the axially deformation of the sensing beam in the best location induced by in-plane acceleration. Theoretical analysis and finite element method simulations are employed to research the performance. The results demonstrate the feasibility and superiority of the structure used for in-plane acceleration measurement. The effects of the geometry parameters on the best location of the sensing beam, the sensitivity and the resonant frequency are also studied, which will contribute to the design and operation of the accelerometer featuring in-plane vibration.