Modelling and simulation of MEMS based sensors for Microbotics

In this age of automation, where robotics play a very important role in all fields particularly in medicine, there are many tasks performed which are inaccessible to humanoid robots. Here the major pushback is the size of the inaccessible micro parts. This is where Microbotics, which is a field of miniaturized robotics whose characteristic dimensions are usually less than 0.1mm, would be a choice. Currently research is on in modeling and designing reliable mesoscopic devices which can overcome the size limitation of humanoid robots. Today miniaturization is a tool of interest not alone because of the size aspect but also due to the capabilities such as sensitivity selectivity and specificity. This work focuses on the design of sensor with necessary aspect dimension in the graphics window followed by meshing with suitable mesh and simulation of different microsensors which are capable to operate individually as a microbot along with some associated mechatronics, or these features can be accumulated to frame a bot of great capabilities. The results proposed in the paper are simulated using COMSOL MULTIPHYSICS package.