Title :
Design and Analysis of a Capacitively-Coupled Clamped-Clamped MEMS Resonator
Author :
Umesh, G. ; Giridhar Nayak, B.M. ; Deshpande, Aniruddh
Author_Institution :
Dept. of Phys., NITK, Surathkal, India
Abstract :
This document details the design, implementation and analysis of a clamped-clamped capacitively-coupled beam resonator with a high Q-factor [>10000] in the VHF band [30-300MHz]. The document also draws a parallel between simulation results and theoretical results of key performance metrics of the design.
Keywords :
Q-factor; UHF resonators; micromechanical resonators; Q-factor; VHF band; capacitively-coupled clamped-clamped MEMS resonator; frequency 30 MHz to 300 MHz; Electrodes; Equations; Force; Materials; Mathematical model; Oscillators; Resonant frequency;
Conference_Titel :
Computational Intelligence and Communication Networks (CICN), 2014 International Conference on
Print_ISBN :
978-1-4799-6928-9
DOI :
10.1109/CICN.2014.46
